Invention Application
- Patent Title: MEMS DEVICES
- Patent Title (中): MEMS器件
-
Application No.: US13128202Application Date: 2009-11-10
-
Publication No.: US20110210435A1Publication Date: 2011-09-01
- Inventor: Greja Johanna Adriana Verheijden , Gerhard Koops
- Applicant: Greja Johanna Adriana Verheijden , Gerhard Koops
- Applicant Address: NL Eindhoven
- Assignee: NXP B.V.
- Current Assignee: NXP B.V.
- Current Assignee Address: NL Eindhoven
- Priority: EP08105755.6 20081110
- International Application: PCT/IB2009/054998 WO 20091110
- Main IPC: H01L29/02
- IPC: H01L29/02 ; H01L21/50
Abstract:
A method of manufacturing a MEMS device comprises forming a MEMS device element 14. A sacrificial layer 20 is provided over the device element and a package cover layer 24 is provided over the sacrificial layer. A spacer layer 13 is formed over the sacrificial layer and is etched to define spacer portions adjacent an outer side wall of the sacrificial layer. These improve the hermetic sealing of the side walls of the cover layer 24.
Public/Granted literature
- US08980698B2 MEMS devices Public/Granted day:2015-03-17
Information query
IPC分类:
