发明申请
US20110163277A1 OXIDE SINTERED COMPACT FOR PREPARING TRANSPARENT CONDUCTIVE FILM
审中-公开
用于制备透明导电膜的氧化物烧结紧密
- 专利标题： OXIDE SINTERED COMPACT FOR PREPARING TRANSPARENT CONDUCTIVE FILM
- 专利标题（中）： 用于制备透明导电膜的氧化物烧结紧密
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申请号： US13063151申请日： 2009-09-18
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公开(公告)号： US20110163277A1公开(公告)日： 2011-07-07
- 发明人: Masakatsu Ikisawa , Masataka Yahagi
- 申请人： Masakatsu Ikisawa , Masataka Yahagi
- 优先权： JP2008-246504 20080925
- 国际申请： PCT/JP2009/066394 WO 20090918
- 主分类号： H01B1/02
- IPC分类号： H01B1/02 ; C23C14/34
摘要：
The present invention provides an ITO amorphous transparent conductive film used in a display electrode for a flat panel display or the like, which can be produced without heating a substrate and without feeding water during the sputtering, while achieving both high etchability and lower resistivity at high levels. An oxide sintered compact containing indium oxide as a main component, while containing one or more elements selected from nickel, manganese, aluminum and germanium as a first additive element, with the total content of the first additive element being 2-12 atom % relative to the total content of indium and the first additive element.
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