Invention Application
- Patent Title: SEMICONDUCTOR MEMORY DEVICE
- Patent Title (中): 半导体存储器件
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Application No.: US12719193Application Date: 2010-03-08
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Publication No.: US20110121381A1Publication Date: 2011-05-26
- Inventor: Takahisa KANEMURA , Tomomi KUSAKA , Takashi IZUMIDA , Masaki KONDO , Nobutoshi AOKI
- Applicant: Takahisa KANEMURA , Tomomi KUSAKA , Takashi IZUMIDA , Masaki KONDO , Nobutoshi AOKI
- Applicant Address: JP Tokyo
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Tokyo
- Priority: JP2009-267236 20091125
- Main IPC: H01L29/788
- IPC: H01L29/788

Abstract:
A semiconductor memory device according to an embodiment of the present invention includes a substrate, a first gate insulator formed on the substrate and serving as an F-N (Fowler-Nordheim) tunneling film, a first floating gate formed on the first gate insulator, a second gate insulator formed on the first floating gate and serving as an F-N tunneling film, a second floating gate formed on the second gate insulator, an intergate insulator formed on the second floating gate and serving as a charge blocking film, and a control gate formed on the intergate insulator, at least one of the first and second floating gates including a metal layer.
Public/Granted literature
- US08354706B2 Semiconductor memory device Public/Granted day:2013-01-15
Information query
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