Invention Application
- Patent Title: WORDLINE RESISTANCE REDUCTION METHOD AND STRUCTURE IN AN INTEGRATED CIRCUIT MEMORY DEVICE
- Patent Title (中): 集成电路存储器件中的电阻降低方法和结构
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Application No.: US12961379Application Date: 2010-12-06
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Publication No.: US20110095370A1Publication Date: 2011-04-28
- Inventor: Shenqing FANG , Jihwan CHOI , Connie WANG , Eunha KIM
- Applicant: Shenqing FANG , Jihwan CHOI , Connie WANG , Eunha KIM
- Main IPC: H01L29/78
- IPC: H01L29/78

Abstract:
Methods and structures for reducing resistance in wordlines of an integrated circuit memory device are disclosed. In one embodiment, the method includes forming multiple columns of polycrystalline silicon for respective number of wordlines, forming core transistor junctions and periphery transistor junctions associated with the wordlines, performing a salicidation process for the periphery transistor junction and performing a salicidation process for the columns of polycrystalline silicon to from the wordlines with low resistance.
Public/Granted literature
- US09240418B2 Wordline resistance reduction method and structure in an integrated circuit memory device Public/Granted day:2016-01-19
Information query
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