发明申请
- 专利标题: ELECTROMAGNETIC SHIELD FOR TESTING INTEGRATED CIRCUITS
- 专利标题(中): 用于测试集成电路的电磁屏蔽
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申请号: US12851680申请日: 2010-08-06
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公开(公告)号: US20110050267A1公开(公告)日: 2011-03-03
- 发明人: Alberto PAGANI
- 申请人: Alberto PAGANI
- 申请人地址: IT Agrate Brianza
- 专利权人: STMICROELECTRONICS S.R.L.
- 当前专利权人: STMICROELECTRONICS S.R.L.
- 当前专利权人地址: IT Agrate Brianza
- 优先权: ITMI2009A001511 20090828
- 主分类号: G01R31/00
- IPC分类号: G01R31/00 ; G01R1/06
摘要:
An embodiment of a probe card is proposed. The probe card comprises a plurality of probes. Each probe is adapted to contact a corresponding terminal of a circuit integrated in at least one die of a semiconductor material wafer during a test phase of the wafer. Said plurality of probes includes at least one probe adapted to provide and/or receive a radio frequency test signal to/from the corresponding terminal during the test phase. Said probe card comprises at least one electromagnetic shield structure corresponding to the at least one probe adapted to provide and/or receive the radio frequency test signal for the at least partial shielding of an electromagnetic field irradiated by such at least one probe adapted to provide and/or receive the radio frequency test signal.
公开/授权文献
- US08907693B2 Electromagnetic shield for testing integrated circuits 公开/授权日:2014-12-09
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