发明申请
US20110050267A1 ELECTROMAGNETIC SHIELD FOR TESTING INTEGRATED CIRCUITS 有权
用于测试集成电路的电磁屏蔽

  • 专利标题: ELECTROMAGNETIC SHIELD FOR TESTING INTEGRATED CIRCUITS
  • 专利标题(中): 用于测试集成电路的电磁屏蔽
  • 申请号: US12851680
    申请日: 2010-08-06
  • 公开(公告)号: US20110050267A1
    公开(公告)日: 2011-03-03
  • 发明人: Alberto PAGANI
  • 申请人: Alberto PAGANI
  • 申请人地址: IT Agrate Brianza
  • 专利权人: STMICROELECTRONICS S.R.L.
  • 当前专利权人: STMICROELECTRONICS S.R.L.
  • 当前专利权人地址: IT Agrate Brianza
  • 优先权: ITMI2009A001511 20090828
  • 主分类号: G01R31/00
  • IPC分类号: G01R31/00 G01R1/06
ELECTROMAGNETIC SHIELD FOR TESTING INTEGRATED CIRCUITS
摘要:
An embodiment of a probe card is proposed. The probe card comprises a plurality of probes. Each probe is adapted to contact a corresponding terminal of a circuit integrated in at least one die of a semiconductor material wafer during a test phase of the wafer. Said plurality of probes includes at least one probe adapted to provide and/or receive a radio frequency test signal to/from the corresponding terminal during the test phase. Said probe card comprises at least one electromagnetic shield structure corresponding to the at least one probe adapted to provide and/or receive the radio frequency test signal for the at least partial shielding of an electromagnetic field irradiated by such at least one probe adapted to provide and/or receive the radio frequency test signal.
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