Invention Application
- Patent Title: SENSOR AND METHOD FOR MANUFACTURING THE SAME
- Patent Title (中): 传感器及其制造方法
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Application No.: US12990717Application Date: 2009-05-13
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Publication No.: US20110042673A1Publication Date: 2011-02-24
- Inventor: Tomoaki Yamabayashi , Osamu Takahashi , Katsunori Kondo , Hiroaki Kikuchi
- Applicant: Tomoaki Yamabayashi , Osamu Takahashi , Katsunori Kondo , Hiroaki Kikuchi
- Priority: JP2008-139045 20080528
- International Application: PCT/JP2009/002092 WO 20090513
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/04 ; H01L21/336

Abstract:
Provided is a sensor having a high sensitivity and a high degree of freedom of layout by reducing constrictions of the channel shape, the reaction field area, and the position. Provided is also a method for manufacturing the sensor. The sensor (10) includes: a source electrode (15), a drain electrode, (14), and a gate electrode (13) arranged on silicon oxide film (12a, 12b); a channel (16) arranged on the silicon oxide films (12a, 12b) and electrically connected to the source electrode (15) and the drain electrode (14); and a reaction field (20) arranged on the silicon oxide films (12a, 12b). The reaction field (20) is formed at a position on the silicon oxide film (12a), the position being different from a position for the channel (16). With this configuration, it is possible to independently select the shape of the channel (16) and the area of the reaction field (20). This enables the sensor (10) to have a high measurement sensitivity and a high degree of freedom of layout.
Public/Granted literature
- US08698210B2 Sensor and method for manufacturing the same Public/Granted day:2014-04-15
Information query
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