发明申请
- 专利标题: VACUUM DEVICE AND BONDING APPARATUS USING THE SAME
- 专利标题(中): 真空装置和使用该装置的连接装置
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申请号: US12567907申请日: 2009-09-28
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公开(公告)号: US20110021105A1公开(公告)日: 2011-01-27
- 发明人: Dong-Sheng LIN , Tzyy-Chyi TSAI , Jian-Jun LI
- 申请人: Dong-Sheng LIN , Tzyy-Chyi TSAI , Jian-Jun LI
- 申请人地址: CN Shenzhen City TW Tu-Cheng
- 专利权人: HONG FU JIN PRECISION INDUSTRY (ShenZhen) CO., LTD.,HON HAI PRECISION INDUSTRY CO., LTD.
- 当前专利权人: HONG FU JIN PRECISION INDUSTRY (ShenZhen) CO., LTD.,HON HAI PRECISION INDUSTRY CO., LTD.
- 当前专利权人地址: CN Shenzhen City TW Tu-Cheng
- 优先权: CN200910304812.4 20090724
- 主分类号: H01J9/38
- IPC分类号: H01J9/38
摘要:
A vacuum device includes a main body and an adjustment assembly connected to the main body. The main body includes a frame, a loading member, and an elastic film. The loading member and the elastic film are arranged at opposite end surfaces of the frame. A chamber is cooperatively formed by the frame, the loading member, and the elastic film. The adjustment assembly adjusts the inner air pressure of the chamber. The loading member includes an absorption area connecting the chamber to outside the main body. The absorption area changes the air pressure inside the chamber. Also provided is a bonding apparatus using the vacuum device.
公开/授权文献
- US08851134B2 Vacuum device and bonding apparatus using the same 公开/授权日:2014-10-07
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