发明申请
- 专利标题： Chucking System for Nano-Manufacturing
- 专利标题（中）： 纳米制造用卡盘系统
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申请号： US12860490申请日： 2010-08-20
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公开(公告)号： US20100314803A1公开(公告)日： 2010-12-16
- 发明人: Daniel A. Babbs , Byung-Jin Choi , Anshuman Cherala
- 申请人： Daniel A. Babbs , Byung-Jin Choi , Anshuman Cherala
- 申请人地址： US TX Austin
- 专利权人： MOLECULAR IMPRINTS, INC.
- 当前专利权人： MOLECULAR IMPRINTS, INC.
- 当前专利权人地址： US TX Austin
- 主分类号： B28B7/12
- IPC分类号： B28B7/12 ; B28B7/10
摘要：
A chucking system may include a plurality of discrete vacuum sections. The size of at least one vacuum section may be configured to be substantially similar to size of a strained region of the substrate. The strained region of the substrate is a localized deformation in the substrate due to separation force applied during a nano-imprint lithography process.
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