Invention Application
US20100277229A1 MICROELECTROMECHANICAL SYSTEM (MEMS) DEVICE WITH SENSTIVITY TRIMMING CIRCUIT AND TRIMMING PROCESS
有权
微电子机电系统（MEMS）设备，具有传感器线性调整和调整过程
- Patent Title: MICROELECTROMECHANICAL SYSTEM (MEMS) DEVICE WITH SENSTIVITY TRIMMING CIRCUIT AND TRIMMING PROCESS
- Patent Title (中): 微电子机电系统（MEMS）设备，具有传感器线性调整和调整过程
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Application No.: US12432758Application Date: 2009-04-30
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Publication No.: US20100277229A1Publication Date: 2010-11-04
- Inventor: Chien-Hsing Lee , Tsung-Min Hsieh , Shao-Yi Wu
- Applicant: Chien-Hsing Lee , Tsung-Min Hsieh , Shao-Yi Wu
- Applicant Address: TW Hsinchu
- Assignee: Solid State System Co., Ltd.
- Current Assignee: Solid State System Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Main IPC: G05F1/10
- IPC: G05F1/10
Abstract:
A microelectromechanical system (MEMS) device includes a diaphragm capacitor, connected between a capacitor biasing voltage source and a ground. A source follower circuit is coupled to the diaphragm capacitor. An amplifier is coupled to the source follower circuit to amplify the voltage signal as an output voltage signal. A programmable trimming circuit is implemented with the amplifier to trim a gain or implemented with the capacitor biasing voltage source to trim voltage applied on the diaphragm capacitor. Whereby, the output voltage signal has a target sensitivity.
Public/Granted literature
- US08094839B2 Microelectromechanical system (MEMS) device with senstivity trimming circuit and trimming process Public/Granted day:2012-01-10
Information query
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