发明申请
- 专利标题: BEAM DEVICE SYSTEM COMPRISING A PARTICLE BEAM DEVICE AND AN OPTICAL MICROSCOPE
- 专利标题(中): 包含粒子束装置和光学显微镜的束装置系统
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申请号: US12734613申请日: 2008-11-11
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公开(公告)号: US20100224780A1公开(公告)日: 2010-09-09
- 发明人: Bernd Spruck , Martin Edelmann , John Craven , Robert Taylor , Martin Kuhner
- 申请人: Bernd Spruck , Martin Edelmann , John Craven , Robert Taylor , Martin Kuhner
- 优先权: EP07120619.7 20071113
- 国际申请: PCT/EP2008/065299 WO 20081111
- 主分类号: G01N23/00
- IPC分类号: G01N23/00 ; G21K5/08
摘要:
A beam device, in particular a particle beam device, for analyzing an object is provided, as well as a system comprising a particle beam device and an optical microscope for optically analyzing an object. The beam device simplifies the exchange and reduces the time of the exchange of objects to be examined. The beam device includes at least one beam generator that generates a beam, at least one objective lens that focuses the beam on an object arranged in a holding element. The objective lens comprises at least one connecting element. The holding element may be connected to the connecting element so that the holding element is removable from the connecting element for modification of the object. Alternatively, the holding element may be mounted to a beam column.
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