发明申请
- 专利标题: Thin film transistor and display device
- 专利标题(中): 薄膜晶体管和显示装置
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申请号: US12654658申请日: 2009-12-29
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公开(公告)号: US20100193772A1公开(公告)日: 2010-08-05
- 发明人: Narihiro Morosawa , Takashige Fujimori
- 申请人: Narihiro Morosawa , Takashige Fujimori
- 申请人地址: JP Tokyo
- 专利权人: Sony Corporation
- 当前专利权人: Sony Corporation
- 当前专利权人地址: JP Tokyo
- 优先权: JP2009-024035 20090204
- 主分类号: H01L51/52
- IPC分类号: H01L51/52 ; H01L29/24
摘要:
Provided is a thin film transistor capable of improving reliability in the thin film transistor including an oxide semiconductor layer. A thin film transistor including: a gate electrode; a gate insulating film formed on the gate electrode; an oxide semiconductor layer forming a channel region corresponding to the gate electrode on the gate insulating film; a channel protective film formed at least in a region corresponding to the channel region on the oxide semiconductor layer; and a source/drain electrode. A top face and a side face of the oxide semiconductor layer are covered with the source/drain electrode and the channel protective layer on the gate insulating film.
公开/授权文献
- US08426851B2 Thin film transistor and display device 公开/授权日:2013-04-23
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