- 专利标题: Physical quantity sensor
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申请号: US12385225申请日: 2009-04-02
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公开(公告)号: US20090229370A1公开(公告)日: 2009-09-17
- 发明人: Tetsuo Fujii , Eishi Kawasaki
- 申请人: Tetsuo Fujii , Eishi Kawasaki
- 申请人地址: JP Kariya-city
- 专利权人: DENSO CORPORATION
- 当前专利权人: DENSO CORPORATION
- 当前专利权人地址: JP Kariya-city
- 优先权: JP2006-163877 20060613; JP2007-060596 20070309
- 主分类号: G01R27/26
- IPC分类号: G01R27/26
摘要:
A physical quantity sensor for detecting a physical quantity includes: a first substrate having a first physical quantity detection element; a second substrate having a second physical quantity detection element, wherein the second substrate contacts the first substrate; and an accommodation space disposed between the first substrate and the second substrate. The first physical quantity detection element is disposed in the accommodation space. The first physical quantity detection element is protected with the first substrate and the second substrate since the first physical quantity detection element is sealed in the accommodation space.
公开/授权文献
- US07950288B2 Physical quantity sensor 公开/授权日:2011-05-31
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