Invention Application
- Patent Title: INTEGRATED CIRCUIT SYSTEM WITH ASSIST FEATURE
- Patent Title (中): 具有辅助功能的集成电路系统
-
Application No.: US11876663Application Date: 2007-10-22
-
Publication No.: US20090102069A1Publication Date: 2009-04-23
- Inventor: Sia Kim Tan , Qunying Lin , Andrew Khoh
- Applicant: Sia Kim Tan , Qunying Lin , Andrew Khoh
- Applicant Address: SG Singapore
- Assignee: CHARTERED SEMICONDUCTOR MANUFACTURING LTD.
- Current Assignee: CHARTERED SEMICONDUCTOR MANUFACTURING LTD.
- Current Assignee Address: SG Singapore
- Main IPC: H01L23/544
- IPC: H01L23/544 ; H01L21/76
Abstract:
An integrated circuit system comprising: providing a substrate; forming a main feature using a first non-cross-junction assist feature over the substrate; forming the main feature using a second non-cross-junction assist feature, adjacent a location of the first non-cross-junction feature, over the substrate; and forming an integrated circuit having the substrate with the main feature thereover.
Public/Granted literature
- US07836420B2 Integrated circuit system with assist feature Public/Granted day:2010-11-16
Information query
IPC分类:
