发明申请
- 专利标题: METHOD FOR FABRICATING EMBEDDED STATIC RANDOM ACCESS MEMORY
- 专利标题(中): 嵌入式静态随机存取存储器的方法
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申请号: US11779880申请日: 2007-07-18
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公开(公告)号: US20090023256A1公开(公告)日: 2009-01-22
- 发明人: Tung-Hsing Lee , Chien-Li Kuo , Yun-San Huang , Chih-Ming Su , Buo-Chin Hsu
- 申请人: Tung-Hsing Lee , Chien-Li Kuo , Yun-San Huang , Chih-Ming Su , Buo-Chin Hsu
- 主分类号: H01L21/8238
- IPC分类号: H01L21/8238
摘要:
The present invention provides a method for fabricating an embedded static random access memory, including providing a semiconductor substrate; defining a logic area and a memory cell area on the semiconductor substrate and defining at least a first conductive device area and at least a second conductive device area in the logic area and the memory cell area respectively; forming a patterned mask on the memory cell area and on the second conductive device area in the logic area and exposing the first conductive device area in the logic area; performing a first conductive ion implantation process on the exposed first conductive device area in the logic area; and removing the patterned mask.
公开/授权文献
- US07588991B2 Method for fabricating embedded static random access memory 公开/授权日:2009-09-15
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