发明申请
US20070215446A1 High Frequency Mems Switch Having a Bent Switching Element and Method for its Production 有权
具有弯曲开关元件的高频存储器开关及其生产方法

  • 专利标题: High Frequency Mems Switch Having a Bent Switching Element and Method for its Production
  • 专利标题(中): 具有弯曲开关元件的高频存储器开关及其生产方法
  • 申请号: US10590699
    申请日: 2005-02-25
  • 公开(公告)号: US20070215446A1
    公开(公告)日: 2007-09-20
  • 发明人: Ulrich PrechtelVolker Ziegler
  • 申请人: Ulrich PrechtelVolker Ziegler
  • 申请人地址: DE Ottobrunn 85521
  • 专利权人: EADS Deutschland GmbH
  • 当前专利权人: EADS Deutschland GmbH
  • 当前专利权人地址: DE Ottobrunn 85521
  • 优先权: DE102004010150.7 20040227
  • 国际申请: PCT/DE05/00317 WO 20050225
  • 主分类号: H01H59/00
  • IPC分类号: H01H59/00 H01H65/00
High Frequency Mems Switch Having a Bent Switching Element and Method for its Production
摘要:
A high-frequency MEMS switch comprises a signal conductor which is arranged on a substrate and an oblong switching element which has a bent elastic bending area and is fastened on the substrate in a cantilevered manner. An electrode arrangement generates an electrostatic force which bends the switching element toward the signal conductor. The switching element is arranged longitudinally parallel to the signal conductor, and has a contact area which extends transversely to the switch element over the signal conductor. Under the effect of the electrostatic force, the elastic bending area of the switching element progressively approaches the electrode arrangement in a direction parallel to the signal line. The switching element has, for example, two mutually parallel extending switching arms, which are mutually connected by a bridge as the contact area and are arranged on both sides of the signal line and parallel thereto.
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