发明申请
US20070148934A1 Method for fabricating semiconductor device with bulb shaped recess gate pattern
有权
制造具有灯泡形凹槽栅极图案的半导体器件的方法
- 专利标题: Method for fabricating semiconductor device with bulb shaped recess gate pattern
- 专利标题(中): 制造具有灯泡形凹槽栅极图案的半导体器件的方法
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申请号: US11411891申请日: 2006-04-27
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公开(公告)号: US20070148934A1公开(公告)日: 2007-06-28
- 发明人: Yong-Tae Cho , Suk-Ki Kim
- 申请人: Yong-Tae Cho , Suk-Ki Kim
- 优先权: KR2005-0127736 20051222
- 主分类号: H01L21/3205
- IPC分类号: H01L21/3205
摘要:
A method for fabricating a semiconductor device with a bulb shaped recess gate pattern includes selectively etching a first portion of a substrate to form a first recess; forming a spacer on sidewalls of the first recess; performing an isotropic etching process on a second portion of the substrate beneath the first recess to form a second recess, the second recess being wider and more rounded than the first recess; removing the spacer; and forming a gate pattern having a first portion buried into the first and second recesses and a second portion projecting over the substrate.
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