Invention Application
- Patent Title: Semiconductor device and ferroelectric memory, and method for manufacturing semiconductor device
- Patent Title (中): 半导体器件和铁电存储器以及半导体器件的制造方法
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Application No.: US11147038Application Date: 2005-06-07
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Publication No.: US20050285276A1Publication Date: 2005-12-29
- Inventor: Akihito Matsumoto , Toshiyuki Kamiya
- Applicant: Akihito Matsumoto , Toshiyuki Kamiya
- Priority: JP2004-188351 20040625
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/768 ; H01L21/8246 ; H01L23/48 ; H01L27/10 ; H01L27/115

Abstract:
A capacitor section is formed with a lower electrode provided on a SiO2 layer above an impurity layer provided in a substrate, a ferroelectric layer provided on the lower electrode, and an upper electrode provided on the ferroelectric layer. Further, the semiconductor device is equipped with a SiO2 layer that electrically insulates the upper electrode from a wiring, a first contact hole in which a W plug is formed for electrically connecting the impurity layer and the lower electrode, and a second contact hole for electrically connecting the upper electrode and the wiring. The first contact hole and the second contact hole are opened at positions mutually deviated as viewed in a plan view of the capacitor section.
Public/Granted literature
- US07528490B2 Semiconductor device and ferroelectric memory, and method for manufacturing semiconductor device Public/Granted day:2009-05-05
Information query
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