- 专利标题: Objective with pupil obscuration
-
申请号: US11102524申请日: 2005-04-08
-
公开(公告)号: US20050180011A1公开(公告)日: 2005-08-18
- 发明人: Hans-Jurgen Mann , Wilhelm Ulrich
- 申请人: Hans-Jurgen Mann , Wilhelm Ulrich
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT AG
- 当前专利权人: Carl Zeiss SMT AG
- 当前专利权人地址: DE Oberkochen
- 优先权: DE10139177.3 20010816
- 主分类号: G02B17/00
- IPC分类号: G02B17/00 ; G02B13/14 ; G02B13/18 ; G02B13/24 ; G02B17/06 ; G02B17/08 ; G03F7/20 ; H01L21/027
摘要:
An objective is configured with a first partial objective and a second partial objective. The first partial objective, which projects a first field plane onto an intermediate image, has a first, convex mirror and a second, concave mirror. The second partial objective, which projects the intermediate image onto a second field plane, has a third and a fourth mirror, both concave. All of the four mirrors have central mirror apertures. The axial distance between the first and second mirrors is in a ratio between 0.95 and 1.05 relative to the distance between the second mirror and the intermediate image. The axial distance ZM3-IM between the third mirror and the second field plane conforms to the relationship 0.03 · Du M3 + 5.0 mm
公开/授权文献
- US07209286B2 Objective with pupil obscuration 公开/授权日:2007-04-24
信息查询
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B17/00 | 有或无折射元件的具有反射面的系统 |