Invention Application
US20050176982A1 Method for producing onium salt derivatives, and novel onium salt derivatives
有权
鎓盐衍生物的制备方法，以及新的鎓盐衍生物
- Patent Title: Method for producing onium salt derivatives, and novel onium salt derivatives
- Patent Title (中): 鎓盐衍生物的制备方法，以及新的鎓盐衍生物
-
Application No.: US10660255Application Date: 2003-09-11
-
Publication No.: US20050176982A1Publication Date: 2005-08-11
- Inventor: Kyoichi Tomita , Shinji Ishii
- Applicant: Kyoichi Tomita , Shinji Ishii
- Priority: JP11-345488 19991203; JP2000-065213 20000309; JP2000-260928 20000830; JP2000-286306 20000921; JP2000-284186 20000919
- Main IPC: C07C25/02
- IPC: C07C25/02 ; C07C25/18 ; C07C303/32 ; C07C305/04 ; C07C305/06 ; C07C309/04 ; C07C309/06 ; C07C309/23 ; C07C309/24 ; C07C309/25 ; C07C309/29 ; C07C309/30 ; C07C309/33 ; C07C309/39 ; C07C309/43 ; C07C381/12 ; C07F9/09 ; C07F9/40 ; C07F9/02
Abstract:
The invention provides a high-yield method for producing onium salt derivatives useful as agents, such as acid-generators, employed in chemically amplified resists; and to provide novel onium salt derivatives. Reaction of an onium salt derivative containing a halide anion or a carboxylate anion with a sulfonic acid ester derivative or a phosphoric acid derivative provides an onium sulfate derivative or an onium phosphate derivative at high yield.
Public/Granted literature
- US07335787B2 Method for producing onium salt derivatives, and novel onium salt derivatives Public/Granted day:2008-02-26
Information query
