发明申请
- 专利标题: PRESSURE SENSOR HAVING DIAPHRAGM
- 专利标题(中): 带压力传感器的压力传感器
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申请号: US11019286申请日: 2004-12-23
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公开(公告)号: US20050166682A1公开(公告)日: 2005-08-04
- 发明人: Hiroaki Tanaka , Inao Toyoda , Yasutoshi Suzuki
- 申请人: Hiroaki Tanaka , Inao Toyoda , Yasutoshi Suzuki
- 专利权人: DENSO CORPORATION
- 当前专利权人: DENSO CORPORATION
- 优先权: JP2004-26953 20040203
- 主分类号: G01L1/16
- IPC分类号: G01L1/16 ; G01L1/18 ; G01L9/00 ; G01L9/04 ; G01L9/06 ; G01L9/08 ; G01L19/04 ; G01L23/18 ; G01L23/22
摘要:
A pressure sensor includes: a casing; a sensor chip with a gauge resistor; a boss disposed on the gauge resistor; a metallic diaphragm capable of distorting in accordance with a pressure; and a load transmission member disposed between the metallic diaphragm and the boss. The casing accommodates the sensor chip, the boss and the load transmission member. The casing is covered with the metallic diaphragm. The pressure applied to the diaphragm is detected such that the load corresponding to the pressure is applied to the gauge resistor through the metallic diaphragm, the load transmission member and the boss so that the pressure is measured on the basis of a resistance change of the gauge resistor. The gauge resistor is larger than the boss.
公开/授权文献
- US06931937B1 Pressure sensor having diaphragm 公开/授权日:2005-08-23
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