发明申请
- 专利标题: Electrolytic processing apparatus and electrolytic processing method
- 专利标题(中): 电解处理装置及电解处理方法
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申请号: US11035373申请日: 2005-01-14
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公开(公告)号: US20050155868A1公开(公告)日: 2005-07-21
- 发明人: Itsuki Kobata , Yutaka Wada , Hirokuni Hiyama , Takayuki Saito , Yasushi Toma , Tsukuru Suzuki , Akira Kodera
- 申请人: Itsuki Kobata , Yutaka Wada , Hirokuni Hiyama , Takayuki Saito , Yasushi Toma , Tsukuru Suzuki , Akira Kodera
- 优先权: JP2004-009655 20040116; JP2004-318380 20041101
- 主分类号: B23H5/08
- IPC分类号: B23H5/08 ; B24B37/04 ; C25F1/00 ; C25F3/00 ; H01L21/321 ; H01L21/768 ; B23H3/00
摘要:
An electrolytic processing apparatus can increase the efficiency of the dissociation reaction of water and efficiently perform electrolytic processing, and can eliminate the need for an operation for a change of ion exchanger. The electrolytic processing apparatus includes: a processing electrode and a feeding electrode; a liquid supply section for supplying a liquid containing an ion-exchange material between the workpiece and at least one of the processing electrode and the feeding electrode; a power source for applying a voltage between the processing electrode and the feeding electrode; and a drive section for moving the workpiece and at least one of the processing electrode and the feeding electrode relative to each other; wherein electrolytic processing of the workpiece is carried out while keeping the workpiece not in contact with and close to the processing electrode at a distance of not more than 10 μm.
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