发明申请
- 专利标题: Tuning fork vibrator, vibrating gyroscope using the same, electronic apparatus using the same, and manufacturing method of the same
- 专利标题(中): 调音叉振动器,使用其的振动陀螺仪,使用其的电子设备及其制造方法
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申请号: US11075088申请日: 2005-03-08
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公开(公告)号: US20050150298A1公开(公告)日: 2005-07-14
- 发明人: Katsumi Fujimoto , Hironari Yamamoto
- 申请人: Katsumi Fujimoto , Hironari Yamamoto
- 优先权: JP2002-162805 20020604; JP2002-334328 20021118
- 主分类号: G01C19/56
- IPC分类号: G01C19/56 ; G01C19/5628 ; H01L41/08 ; H01L41/22 ; H01L41/338 ; H02N2/00 ; H04R17/00
摘要:
A tuning fork vibrator includes a long plate-shaped vibration unit having a first principal surface and a second principal surface, a base disposed at one end of the second principal surface of the vibration unit in the longitudinal direction, and a slit for dividing the vibration unit into two legs defining a tuning fork along the longitudinal direction symmetrically in the width direction of the vibration unit. The slit is formed so as to include a portion of the base in the vicinity to the vibration unit.
公开/授权文献
- US07526852B2 Method of manufacturing a tuning fork vibrator 公开/授权日:2009-05-05
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