Invention Application
US20050145923A1 NAND flash memory with enhanced program and erase performance, and fabrication process
审中-公开
NAND闪存具有增强的编程和擦除性能,以及制作工艺
- Patent Title: NAND flash memory with enhanced program and erase performance, and fabrication process
- Patent Title (中): NAND闪存具有增强的编程和擦除性能,以及制作工艺
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Application No.: US10753103Application Date: 2004-01-06
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Publication No.: US20050145923A1Publication Date: 2005-07-07
- Inventor: Chiou-Feng Chen , Prateep Tuntasood , Der-Tsyr Fan
- Applicant: Chiou-Feng Chen , Prateep Tuntasood , Der-Tsyr Fan
- Main IPC: G11C16/04
- IPC: G11C16/04 ; H01L21/82 ; H01L21/8247 ; H01L27/115 ; H01L29/788

Abstract:
NAND flash memory cell array and fabrication process in which control gates and floating gates are stacked in pairs arranged in rows between a bit line diffusion and a common source diffusion, with select gates on both sides of each of the pairs of stacked gates. The gates in each stacked pair are self-aligned with each other and
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