Invention Application
US20050103635A1 Method of producing micro component 审中-公开
微量成分的生产方法

Method of producing micro component
Abstract:
To produce a micro component, a resin base (1) capable of being dissolved by a solvent is formed, physical external force is allowed to act on the resin base (1) to form a concave (3) and after a metal is filled into the concave (3), an excessive metal is removed by grinding and the resin base (1) is dissolved by the solvent. Consequently, the necessity for lithography apparatuses such as a stepper and an etching apparatus can be eliminated, economy can be improved and production of components having complicated shapes that the lithographic technology cannot easily produce can also be produced.
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