发明申请
- 专利标题: Load-adjustable surface acoustic wave actuator arrangement
- 专利标题(中): 负载可调声表面波传动装置
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申请号: US10686595申请日: 2003-10-17
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公开(公告)号: US20050082945A1公开(公告)日: 2005-04-21
- 发明人: Ta-Hsin Chou , Yi-Ming Chu , Wei-Han Wang , Cheng-Hua Wu
- 申请人: Ta-Hsin Chou , Yi-Ming Chu , Wei-Han Wang , Cheng-Hua Wu
- 申请人地址: TW Hsinchu Hsien 310,ROC
- 专利权人: Industrial Technology Research Institute
- 当前专利权人: Industrial Technology Research Institute
- 当前专利权人地址: TW Hsinchu Hsien 310,ROC
- 主分类号: G05D3/00
- IPC分类号: G05D3/00 ; H01L41/09 ; H02N2/00 ; H03H9/145 ; H03H9/25 ; H01L41/04
摘要:
A load-adjustable SAW (Surface Acoustic Wave) actuator arrangement includes a platform having two sliding bearings symmetrically disposed at two sides; a SAW actuator disposed in the platform between the sliding bearings for producing a surface acoustic wave at the top surface thereof, a slider disposed inside the platform and movable by the SAW actuator along the sliding bearings, and a support structure. The slider has a pressure bearing structure disposed in contact with the top surface of the SAW actuator and two positioning portions respectively supported on the sliding bearings. The support structure applies a predetermined force to the slider subject to the load carried on the slider, keeping the contact pressure between the slider and the SAW actuator about a constant value.
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