发明申请
- 专利标题： Nanoscale pyrogenic oxides
- 专利标题（中）： 纳米级致热氧化物
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申请号： US10417137申请日： 2003-04-17
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公开(公告)号： US20030206854A1公开(公告)日： 2003-11-06
- 发明人: Andreas Gutsch , Thomas Hennig , Stipan Katusic , Michael Kramer , Gunther Michael , Geoffrey J. Varga
- 申请人： Degussa AG
- 申请人地址： null
- 专利权人： Degussa AG
- 当前专利权人： Degussa AG
- 当前专利权人地址： null
- 优先权： EP00107237.0 20000403
- 主分类号： C01F007/02
- IPC分类号： C01F007/02
摘要：
Nanoscale, pyrogenically produced oxides and/or mixed oxides having a BET surface area of between 1 m2/g and 600 m2/g and a chloride content of less than 0.05 wt. % are produced by converting organometallic and/or organometalloid substances into the oxides at temperatures of above 200null C. The oxides may be used as a polishing agent in the electronics industry (CMP).
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