发明申请
US20010036511A1 Method for producing organic insulating film 有权
有机绝缘膜的制造方法

  • 专利标题: Method for producing organic insulating film
  • 专利标题(中): 有机绝缘膜的制造方法
  • 申请号: US09793095
    申请日: 2001-02-27
  • 公开(公告)号: US20010036511A1
    公开(公告)日: 2001-11-01
  • 发明人: Yuji Yoshida
  • 优先权: JP2000-055431 20000301
  • 主分类号: B05D003/02
  • IPC分类号: B05D003/02 B05D003/04
Method for producing organic insulating film
摘要:
A method for producing an organic insulating film comprising the steps of coating a solution containing a dissolved organic resin having a structure of the following formula (1) on a substrate, and exposing the coated substrate at a temperature of 200null C. or more under an atmosphere of an oxygen partial pressure of 0.01 atm or less, 1 wherein each of R1 to R8 is independently selected from the group consisting of a hydrogen atom, fluorine atom, chlorine atom, bromine atom and iodine atom, alkyl groups having 1 to 10 carbon atoms, functional groups containing a double bond having 2 to 10 carbon atoms, functional groups containing a triple bond having 2 to 10 carbon atoms, a methoxy group, ethoxy group and propoxy group.
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