Invention Grant
- Patent Title: Display device and manufacturing method of display device
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Application No.: US17533588Application Date: 2021-11-23
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Publication No.: US12230718B2Publication Date: 2025-02-18
- Inventor: Shunpei Yamazaki , Yasuharu Hosaka , Mitsuo Mashiyama , Kenichi Okazaki
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP Atsugi
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi
- Agency: Robinson Intellectual Property Law Office, P.C.
- Agent Eric J. Robinson
- Priority: JP2020-201868 20201204
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/66 ; H10K59/12 ; H10K59/121
Abstract:
A circuit capable of high-speed operation and a pixel are integrally formed over the same substrate. A first metal oxide film, a first metal film, and an island-shaped first resist mask are formed over a first insulating layer. An island-shaped first metal layer and an island-shaped first oxide semiconductor layer are formed and a part of a top surface of the first insulating layer is exposed; then, the first resist mask is removed. A second metal oxide film, a second metal film, and an island-shaped second resist mask are formed over the first metal layer and the first insulating layer. An island-shaped second metal layer and an island-shaped second oxide semiconductor layer are formed; then, the second resist mask is removed. The first metal layer and the second metal layer are removed.
Public/Granted literature
- US20220181492A1 DISPLAY DEVICE AND MANUFACTURING METHOD OF DISPLAY DEVICE Public/Granted day:2022-06-09
Information query
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