Invention Grant
- Patent Title: System and method for generating layout diagram including wiring arrangement
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Application No.: US18448143Application Date: 2023-08-10
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Publication No.: US12216981B2Publication Date: 2025-02-04
- Inventor: Fong-Yuan Chang , Chin-Chou Liu , Hui-Zhong Zhuang , Meng-Kai Hsu , Pin-Dai Sue , Po-Hsiang Huang , Yi-Kan Cheng , Chi-Yu Lu , Jung-Chou Tsai
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Hauptman Ham, LLP
- Main IPC: G06F30/398
- IPC: G06F30/398 ; G06F30/392 ; G06F30/394 ; G06F119/18

Abstract:
A system (for generating a layout diagram of a wire routing arrangement) includes a processor and memory including computer program code for one or more programs, the system generating the layout diagram including: placing, relative to a given one of masks in a multi-patterning context, a given cut pattern at a first candidate location over a corresponding portion of a given conductive pattern in a metallization layer; determining that the first candidate location results in an intra-row non-circular group of a given row which violates a design rule, the intra-row non-circular group including first and second cut patterns which abut a same boundary of the given row, and a total number of cut patterns in the being an even number; and temporarily preventing placement of the given cut pattern in the metallization layer at the first candidate location until a correction is made which avoids violating the design rule.
Public/Granted literature
- US20230385522A1 SYSTEM AND METHOD FOR GENERATING LAYOUT DIAGRAM INCLUDING WIRING ARRANGEMENT Public/Granted day:2023-11-30
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