Invention Grant
- Patent Title: Nanoimprinted photonic integrated circuits
-
Application No.: US18479418Application Date: 2023-10-02
-
Publication No.: US12210189B2Publication Date: 2025-01-28
- Inventor: Mark William Knight , Stephanie Roxane Sandor-Leahy , Lakshminarayanan Ravi Narasimhan
- Applicant: NORTHROP GRUMMAN SYSTEMS CORPORATION
- Applicant Address: US VA Falls Church
- Assignee: NORTHROP GRUMMAN SYSTEMS CORPORATION
- Current Assignee: NORTHROP GRUMMAN SYSTEMS CORPORATION
- Current Assignee Address: US VA Falls Church
- Agency: Tarolli, Sundheim, Covell & Tummino LLP
- Main IPC: G02B6/136
- IPC: G02B6/136 ; G02B6/12

Abstract:
A method of making a photonic integrated circuit (PIC) is provided. The method comprises depositing a functional resist material layer over a substrate, disposing and pressing a stamp with a plurality of nanopatterns into the functional resist material for a period of time, and removing the stamp from the functional resist material to provide nanofeatures that are inverted versions of the nanopatterns, wherein the nanofeatures form one or more optical elements.
Public/Granted literature
- US20240027687A1 NANOIMPRINTED PHOTONIC INTEGRATED CIRCUITS Public/Granted day:2024-01-25
Information query