Invention Grant
- Patent Title: Embedded cooling systems and methods of manufacturing embedded cooling systems
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Application No.: US17876376Application Date: 2022-07-28
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Publication No.: US12191233B2Publication Date: 2025-01-07
- Inventor: Belgacem Haba , Thomas Workman , Cyprian Emeka Uzoh , Guilian Gao , Rajesh Katkar
- Applicant: Adeia Semiconductor Bonding Technologies Inc.
- Applicant Address: US CA San Jose
- Assignee: Adeia Semiconductor Bonding Technologies Inc.
- Current Assignee: Adeia Semiconductor Bonding Technologies Inc.
- Current Assignee Address: US CA San Jose
- Agency: HALEY GUILIANO LLP
- Main IPC: H01L23/34
- IPC: H01L23/34 ; H01L23/00 ; H01L23/32 ; H01L23/467 ; H01L23/473 ; H01L25/065 ; H01L25/10 ; H01L25/18

Abstract:
Embodiments herein provide for fluidic cooling assemblies embedded within a device package and related manufacturing methods. In one embodiment, the cooling assembly includes a cold plate body attached to a singulated device and a manifold lid attached to the cold plate body. The cold plate body has a first side adjacent to the singulated device and an opposite second side, and the manifold lid is attached to the second side. In some embodiments, the first side of the cold plate body and the backside of the singulated device each comprise a dielectric material surface, the cold plate body is attached to the singulated device by direct dielectric bonds formed between the dielectric material surfaces, the cold plate body, and the manifold lid define one or more cavities, and the one or more cavities form at least a portion of a fluid flow path from an inlet to an outlet of the manifold lid.
Public/Granted literature
- US20240038633A1 EMBEDDED COOLING SYSTEMS AND METHODS OF MANUFACTURING EMBEDDED COOLING SYSTEMS Public/Granted day:2024-02-01
Information query
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