Invention Grant
- Patent Title: Resonator and resonance device for vibrating in a contour vibration mode
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Application No.: US17478437Application Date: 2021-09-17
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Publication No.: US12155369B2Publication Date: 2024-11-26
- Inventor: Toshio Nishimura , Ville Kaajakari
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo
- Agency: ArentFox Schiff LLP
- Main IPC: H03H9/24
- IPC: H03H9/24 ; H03H9/17 ; H03H3/013

Abstract:
A resonator is provided that includes a vibration member that includes a substrate, a metal layer formed along one of main surfaces of the substrate, and a piezoelectric thin film disposed between the substrate and the metal layer. The vibration member vibrates such that a main vibration is a contour vibration. Moreover, a frame surrounds at least a portion of the vibration member, and a support unit connects the vibration member to the frame. The vibration member includes depressed portions on or above the one of main surfaces where the piezoelectric thin film is removed.
Public/Granted literature
- US20220006442A1 RESONATOR AND RESONANCE DEVICE Public/Granted day:2022-01-06
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