公开(公告)号：US12155369B2

公开(公告)日：2024-11-26

申请号：US17478437

申请日：2021-09-17

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Toshio Nishimura ,  Ville Kaajakari

IPC: H03H9/24 ,  H03H9/17 ,  H03H3/013

Abstract: A resonator is provided that includes a vibration member that includes a substrate, a metal layer formed along one of main surfaces of the substrate, and a piezoelectric thin film disposed between the substrate and the metal layer. The vibration member vibrates such that a main vibration is a contour vibration. Moreover, a frame surrounds at least a portion of the vibration member, and a support unit connects the vibration member to the frame. The vibration member includes depressed portions on or above the one of main surfaces where the piezoelectric thin film is removed.

公开(公告)号：US11108373B2

公开(公告)日：2021-08-31

申请号：US16174526

申请日：2018-10-30

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Toshio Nishimura

IPC: H03H9/19 ,  H03H9/10 ,  H03H9/17 ,  H03H9/02 ,  B81B3/00 ,  H03H9/24 ,  H03H9/05 ,  H03H9/13 ,  H03H9/15

Abstract: A vibrator that includes a silicon substrate, an electrode facing a surface of the silicon substrate, and a piezoelectric body between the silicon substrate and the electrode and that produces contour vibration in a plane along the surface of the silicon substrate in accordance with a voltage applied to the electrode. The vibrator includes one or more substantially rectangular vibration regions each having a long side parallel to a node of the contour vibration of the piezoelectric body and a short side orthogonal to the node of the contour vibration of the piezoelectric body and corresponding to a half-wavelength of the contour vibration. The resonator satisfies W/T≥4 and y=−0.85×(1/T)+0.57±0.05 where T is the thickness of the silicon substrate, W is the width of the short side of the vibration region, and y is the resistivity of the silicon substrate.

公开(公告)号：US10972071B2

公开(公告)日：2021-04-06

申请号：US15690570

申请日：2017-08-30

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Toshio Nishimura ,  Yuichi Goto ,  Kentaro Yoshii ,  Ville Kaajakari

IPC: H03H9/13 ,  H03H9/05 ,  H03H9/10 ,  H03H9/24 ,  H03H9/02 ,  H03H9/17 ,  H01L41/047

Abstract: A resonator with stabilized resonant frequency that includes a lower electrode, a plurality of upper electrodes, and a piezoelectric film disposed between the lower electrode and the plurality of upper electrodes. Moreover, an upper lid having a first and second opposing surfaces is provided so that the first surface faces and seals a first surface of the resonator. In addition, a lower lid having a first and second opposing surfaces is provided so that the first surface faces and seals a second surface of the resonator. The resonator further includes a power terminal electrically connected to the upper electrodes and a ground terminal provided on the second surface of the upper lid. The lower electrode is electrically connected to the ground terminal by the upper lid.

公开(公告)号：US10749496B2

公开(公告)日：2020-08-18

申请号：US16188865

申请日：2018-11-13

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Kentaro Yoshii ,  Yuichi Goto ,  Keisuke Takeyama ,  Toshio Nishimura ,  Shungo Morinaga ,  Ryota Kawai ,  Yoshihisa Inoue

IPC: H03H9/21 ,  H03H9/02 ,  H03H9/10 ,  H03H3/007 ,  H03H9/24 ,  H03H9/05 ,  H03H9/15

Abstract: A resonator is provided having a first electrode and a second electrode; and a piezoelectric film that is disposed between the first and second electrodes, has an upper surface opposing the first electrode, and that vibrates in a predetermined vibration mode when a voltage is applied between the first and second electrodes. Moreover, the resonator includes a protective film made of an insulator and disposed opposing the upper surface of the piezoelectric film with the first electrode interposed therebetween. Furthermore, a conductive film made of a conductor is provided that is disposed opposing the upper surface of the piezoelectric film with the protective film interposed therebetween, where the conductive film is electrically connected to any one of the first and second electrodes.

公开(公告)号：US20200259476A1

公开(公告)日：2020-08-13

申请号：US16860196

申请日：2020-04-28

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Wakana Hirota ,  Toshio Nishimura ,  Ville Kaajakari

IPC: H03H9/02 ,  H03H9/05 ,  H03H9/10 ,  H03H9/24

Abstract: A resonator that includes a substrate, an insulating film that is formed on the substrate, and vibration regions each of which is formed on the insulating film and includes lower electrodes that are formed on the insulating film, a piezoelectric film that is formed on the lower electrodes, and an upper electrode that is formed on the piezoelectric film. At least one lower electrode of the lower electrodes that are formed on the insulating film has an electric potential that differs from an electric potential of another lower electrode such that at least one vibration region vibrates in antiphase with another vibration region. Moreover, a package seals a resonator and includes the substrate, the insulating film, and the vibration regions and includes a ground terminal for grounding the substrate.

公开(公告)号：US10224896B2

公开(公告)日：2019-03-05

申请号：US15211055

申请日：2016-07-15

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Toshio Nishimura ,  Keiichi Umeda ,  Ville Kaajakari

IPC: H03H9/125 ,  H01L41/04 ,  H03H9/02 ,  H03H9/24 ,  H03H9/05 ,  H03H9/15

Abstract: A piezoelectric vibrator that includes first and second vibration portions that vibrate with mutually reverse phases. Each of the vibration portions includes a silicon layer, a first piezoelectric layer and a second piezoelectric layer that has polarization in an opposite direction to a direction of polarization of the first piezoelectric layer. First and second electrodes are disposed on opposite sides of the second piezoelectric layer. The piezoelectric vibrator has a structure such that a first potential is applied to the first electrode of the first vibration portion and the second electrode of the second vibration portion, and a second potential is applied to the second electrode of the first vibration portion and the first electrode of the second vibration portion.

公开(公告)号：US20180191329A1

公开(公告)日：2018-07-05

申请号：US15904906

申请日：2018-02-26

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Toshio Nishimura ,  Ville Kaajakari

IPC: H03H9/24 ,  H03H9/02 ,  H03H9/05 ,  H03H9/10

CPC classification number: H03H9/2405 ,  H03H9/02433 ,  H03H9/0595 ,  H03H9/1035 ,  H03H9/1057 ,  H03H2009/0244

Abstract: A resonator that includes a piezoelectric vibrating portion; a retainer provided in at least part of an area surrounding the piezoelectric vibrating portion; a first node generating portion disposed between the piezoelectric vibrating portion and the retainer; a first connecting arm that connects the first node generating portion to a region in the piezoelectric vibrating portion that faces the first node generating portion; and a first retaining arm that connects the first node generating portion to a region in the retainer that faces the first node generating portion. The first node generating portion is substantially symmetrical with respect to each of two lines passing through a center of the first node generating portion along a first direction and a second direction orthogonal to the first direction, with the first direction being a direction that the first connecting arm connects the first node generating portion to the piezoelectric vibrating portion.

公开(公告)号：US20170201226A1

公开(公告)日：2017-07-13

申请号：US15472576

申请日：2017-03-29

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Ryota Kawai ,  Daisuke Nakamura ,  Toshio Nishimura

IPC: H03H9/02 ,  H03H9/10 ,  H03H9/17

CPC classification number: H03H9/02448 ,  H03H9/02259 ,  H03H9/10 ,  H03H9/1057 ,  H03H9/173 ,  H03H9/2405 ,  H03H2009/155 ,  H03H2009/241

Abstract: A piezoelectric vibrator is a piezoelectric vibrator including a vibration portion. The vibration portion has an n-type Si layer which is a degenerated semiconductor and which has a resistivity of not less than 0.5 mΩcm and not greater than 1.2 mΩcm and preferably not greater than 0.9 mΩcm.

公开(公告)号：US09553561B2

公开(公告)日：2017-01-24

申请号：US14643286

申请日：2015-03-10

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Keiichi Umeda ,  Takehiko Kishi ,  Toshio Nishimura ,  Takashi Hase

IPC: H03H9/21 ,  H03H3/007 ,  H03H9/02 ,  H03H9/24 ,  H01L41/29 ,  H01L41/31

CPC classification number: H03H9/21 ,  H01L41/29 ,  H01L41/31 ,  H03H3/0072 ,  H03H9/02448 ,  H03H9/2489 ,  Y10T29/42

Abstract: A vibrating device having vibrating arms connected to a supporter. The vibrating arms have an n-type Si layer which is a degenerated semiconductor and an exciter provided on the n-type Si layer. The exciter has a piezoelectric thin film and a first and second electrodes with the piezoelectric thin film interposed therebetween.

Abstract translation: 具有连接到支撑件的振动臂的振动装置。 振动臂具有作为退化半导体的n型Si层和设置在n型Si层上的激励器。 励磁机具有压电薄膜和插入压电薄膜的第一和第二电极。

公开(公告)号：US12107564B2

公开(公告)日：2024-10-01

申请号：US17749736

申请日：2022-05-20

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Keisuke Takeyama ,  Toshio Nishimura

IPC: H03H9/24 ,  H03H9/05 ,  H03H9/10

CPC classification number: H03H9/2452 ,  H03H9/0595 ,  H03H9/1057

Abstract: A resonator is provided that includes a vibrator with two portions that vibrate in phases opposite to each other; a frame that is disposed to surround at least part of the vibrator; and a holding unit that supports a boundary between the two portions and connects the vibrator to the frame. Moreover, a frequency adjustment film is disposed on a surface of the vibrator in an area between a connection portion of the holding unit connected to the vibrator and an end of the vibrator that faces the connection portion in a direction along the boundary between the two portions.