- 专利标题： Arene molybdenum (0) precursors for deposition of molybdenum films
-
申请号： US18097406申请日： 2023-01-16
-
公开(公告)号： US12116376B2公开(公告)日： 2024-10-15
- 发明人: Andrea Leoncini , Paul Mehlmann , Nemanja Dordevic , Han Vinh Huynh , Doreen Wei Ying Yong
- 申请人： Applied Materials, Inc. , National University of Singapore
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Servilla Whitney LLC
- 分案原申请号： US17146886 2021.01.12
- 主分类号： C23C16/32
- IPC分类号： C23C16/32 ; C07F11/00 ; C23C16/18 ; C23C16/34 ; C23C16/40 ; C23C16/42
摘要：
Molybdenum(0) coordination complexes comprising an arene ligand and one or more neutral ligands which coordinate to the metal center by carbon, nitrogen or phosphorous are described. Methods for depositing molybdenum-containing films on a substrate are described. The substrate is exposed to a molybdenum precursor and a reactant to form the molybdenum-containing film (e.g., elemental molybdenum, molybdenum oxide, molybdenum carbide, molybdenum silicide, molybdenum nitride). The exposures can be sequential or simultaneous.
公开/授权文献
信息查询
IPC分类:
