Invention Grant
- Patent Title: Nitride crystal substrate and method for manufacturing the same
-
Application No.: US17649983Application Date: 2022-02-04
-
Publication No.: US12104279B2Publication Date: 2024-10-01
- Inventor: Fumimasa Horikiri
- Applicant: SUMITOMO CHEMICAL COMPANY, LIMITED
- Applicant Address: JP Tokyo
- Assignee: SUMITOMO CHEMICAL COMPANY, LIMITED
- Current Assignee: SUMITOMO CHEMICAL COMPANY, LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JP 18112844 2018.06.13
- Main IPC: C30B29/40
- IPC: C30B29/40 ; C01B21/06 ; G01N21/95 ; H01L21/02 ; C30B25/02 ; G01N21/84

Abstract:
There is provided a nitride crystal substrate constituted by group-III nitride crystal, containing n-type impurities, with an absorption coefficient α being approximately expressed by equation (1) by a least squares method in a wavelength range of at least 1 μm or more and 3.3 μm or less.
α
=
N
e
K
λ
a
(
where
1.5
×
10
-
19
≤
K
≤
6.
×
10
-
19
,
a
=
3
)
,
(
1
)
here, a wavelength is λ (μm), an absorption coefficient of the nitride crystal substrate at 27° C. is α (cm−1), a carrier concentration in the nitride crystal substrate is Ne (cm−3), and K and a are constants, wherein an error of an actually measured absorption coefficient with respect to the absorption coefficient α obtained from equation (1) at a wavelength of 2 μm is within +0.1α, and in a reflection spectrum measured by irradiating the nitride crystal substrate with infrared light, there is no peak with a peak top within a wavenumber range of 1,200 cm−1 or more and 1,500 cm−1 or less.
α
=
N
e
K
λ
a
(
where
1.5
×
10
-
19
≤
K
≤
6.
×
10
-
19
,
a
=
3
)
,
(
1
)
here, a wavelength is λ (μm), an absorption coefficient of the nitride crystal substrate at 27° C. is α (cm−1), a carrier concentration in the nitride crystal substrate is Ne (cm−3), and K and a are constants, wherein an error of an actually measured absorption coefficient with respect to the absorption coefficient α obtained from equation (1) at a wavelength of 2 μm is within +0.1α, and in a reflection spectrum measured by irradiating the nitride crystal substrate with infrared light, there is no peak with a peak top within a wavenumber range of 1,200 cm−1 or more and 1,500 cm−1 or less.
Public/Granted literature
- US20220154367A1 NITRIDE CRYSTAL SUBSTRATE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2022-05-19
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