- 专利标题: Polishing method and polishing apparatus
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申请号: US18187786申请日: 2023-03-22
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公开(公告)号: US12076830B2公开(公告)日: 2024-09-03
- 发明人: Masashi Kabasawa
- 申请人: EBARA CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: EBARA CORPORATION
- 当前专利权人: EBARA CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: PEARNE & GORDON LLP
- 优先权: JP 19108387 2019.06.11 JP 20093103 2020.05.28
- 分案原申请号: US16894173 2020.06.05
- 主分类号: B24B37/015
- IPC分类号: B24B37/015 ; B24B37/013 ; B24B37/04
摘要:
A polishing method capable of terminating polishing of a substrate, such as a wafer, at a preset polishing time is disclosed. The polishing method includes: polishing a substrate by pressing the substrate against a polishing surface of a polishing pad, while regulating a temperature of the polishing surface by a heat exchanger; calculating a target polishing rate required for an actual polishing time to coincide with a target polishing time, the actual polishing time being a time duration from start of polishing the substrate until a film thickness of the substrate reaches a target thickness; determining a target temperature of the polishing surface that can achieve the target polishing rate; and during polishing of the substrate, changing a temperature of the polishing surface to the target temperature by the heat exchanger.
公开/授权文献
- US20230219187A1 POLISHING METHOD AND POLISHING APPARATUS 公开/授权日:2023-07-13
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