- 专利标题: Rotating sample holder for random angle sampling in tomography
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申请号: US18357904申请日: 2023-07-24
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公开(公告)号: US12074007B2公开(公告)日: 2024-08-27
- 发明人: Bart Jozef Janssen , Edwin Verschueren , Erik Franken
- 申请人: FEI Company
- 申请人地址: US OR Hillsboro
- 专利权人: FEI Company
- 当前专利权人: FEI Company
- 当前专利权人地址: US OR Hillsboro
- 代理机构: Klarquist Sparkman, LLP
- 主分类号: H01J37/20
- IPC分类号: H01J37/20
摘要:
A sample holder retains a sample and can continuously rotate the sample in a single direction while the sample is exposed to a charged particle beam (CPB) or other radiation source. Typically, the CPB is strobed to produce a series of CPB images at random or arbitrary angles of rotation. The sample holder can rotate more than one complete revolution of the sample. The CPB images are used in tomographic reconstruction, and in some cases, relative rotation angles are used in the reconstruction, without input of an absolute rotation angle.
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