Invention Grant
- Patent Title: Hydrogen gas sensor utilizing electrically isolated tunneling magnetoresistive sensing elements
-
Application No.: US17753360Application Date: 2020-08-18
-
Publication No.: US12055605B2Publication Date: 2024-08-06
- Inventor: James Geza Deak , Zhimin Zhou
- Applicant: MultiDimension Technology Co., Ltd.
- Applicant Address: CN Zhangjiagang
- Assignee: MultiDimension Technology Co., Ltd.
- Current Assignee: MultiDimension Technology Co., Ltd.
- Current Assignee Address: CN Zhangjiagang
- Agency: Schwegman Lundberg & Woessner, P.A.
- Priority: CN 1910817744.5 2019.08.30
- International Application: PCT/CN2020/109816 2020.08.18
- International Announcement: WO2021/036867A 2021.03.04
- Date entered country: 2022-07-15
- Main IPC: G01R33/05
- IPC: G01R33/05 ; G01N33/00 ; G01R33/09

Abstract:
A hydrogen gas sensor utilizing electrically isolated tunneling magnetoresistive sensing elements is provided. The hydrogen gas sensor comprises: a substrate in an X-Y plane, tunneling magnetoresistive sensors located on the substrate, and a hydrogen sensing layer located on the tunnel magnetoresistive sensors. The hydrogen sensing layer and the tunneling magnetoresistive sensor are electrically isolated from each other. The hydrogen sensing layer includes a multi-layer thin film structure formed from palladium layers and ferromagnetic layers, wherein the palladium layers are used for absorbing hydrogen in the air that causes a change in the orientation angle of a magnetic anisotropy field in each of the ferromagnetic layers in the X-Z plane into an X-axis direction. The tunnel magnetoresistive sensors are used for detecting a magnetic field signal of the hydrogen sensing layer, wherein the magnetic signal determines the hydrogen gas concentration. This hydrogen gas sensor ensures measurement safety.
Public/Granted literature
- US20220342012A1 HYDROGEN GAS SENSOR BASED ON ELECTRICALLY ISOLATED TUNNEL MAGNETORESISTIVE SENSITIVE ELEMENT Public/Granted day:2022-10-27
Information query