Invention Grant
- Patent Title: Pressure port for ultrasonic transducer on CMOS sensor
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Application No.: US16401870Application Date: 2019-05-02
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Publication No.: US12053323B2Publication Date: 2024-08-06
- Inventor: Keith G. Fife , Jianwei Liu , Jungwook Yang , Joseph Lutsky
- Applicant: BFLY Operations, Inc.
- Applicant Address: US CT Guilford
- Assignee: BFLY Operations Inc
- Current Assignee: BFLY Operations Inc
- Current Assignee Address: US CT Guilford
- Agency: Boston & Galway, LLC
- Main IPC: A61B8/12
- IPC: A61B8/12 ; B06B1/02 ; B06B1/06 ; G01N29/24 ; H10N30/20

Abstract:
Micromachined ultrasonic transducers having pressure ports are described. The micromachined ultrasonic transducers may comprise flexible membranes configured to vibrate over a cavity. The cavity may be sealed, in some instances by the membrane itself. A pressure port may provide access to the cavity, and thus control of the cavity pressure. In some embodiments, an ultrasound device including an array of micromachined ultrasonic transducers is provided, with pressure ports for at least some of the ultrasonic transducers. The pressure ports may be used to control pressure across the array.
Public/Granted literature
- US20190336099A1 PRESSURE PORT FOR ULTRASONIC TRANSDUCER ON CMOS SENSOR Public/Granted day:2019-11-07
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