- 专利标题: Liquid metal MEMS switch
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申请号: US18213296申请日: 2023-06-23
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公开(公告)号: US12046430B2公开(公告)日: 2024-07-23
- 发明人: Adam Joseph Fruehling , Dishit Paresh Parekh , Daniel Lee Revier , Benjamin Stassen Cook
- 申请人: Texas Instruments Incorporated
- 申请人地址: US TX Dallas
- 专利权人: TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人: TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人地址: US TX Dallas
- 代理商 Ray A. King; Frank D. Cimino
- 分案原申请号: US16234243 2018.12.27
- 主分类号: H01H29/28
- IPC分类号: H01H29/28 ; H01H1/00 ; H01H11/00 ; H01H29/00
摘要:
A switch that includes a droplet capable of spreading between two conductors to allow them to be coupled when a voltage is applied. The droplet can be enclosed by a cap that is bonded to a wafer that the droplet is placed upon, and include metallic properties. The cap can create a cavity that may be filled by a fluid, gas, or vapor. The cavity can have multiple conductors that extend partially or fully through it. The droplet can couple the conductors when specific voltages, or frequencies are applied to them. At the specific voltage and frequency, the droplet can spread, allowing at least two conductors to be coupled.
公开/授权文献
- US20230335355A1 LIQUID METAL MEMS SWITCH 公开/授权日:2023-10-19
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