- 专利标题: Systems and apparatuses for contamination-free vacuum transfer of samples
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申请号: US17666385申请日: 2022-02-07
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公开(公告)号: US12020895B2公开(公告)日: 2024-06-25
- 发明人: Jakub Kuba , John M. Mitchels , Jakub Drahotský , Michal Valík
- 申请人: FEI Company
- 申请人地址: US OR Hillsboro
- 专利权人: FEI Company
- 当前专利权人: FEI Company
- 当前专利权人地址: US OR Hillsboro
- 代理机构: Klarquist Sparkman, LLP
- 主分类号: H01J37/18
- IPC分类号: H01J37/18 ; H01J37/28 ; G01N1/42
摘要:
Various approaches are provided for contamination-free vacuum transfer of samples. As one example, an apparatus includes a compartment configured to store multiple samples held by a cartridge removably coupled to the compartment, a sample port for transferring the cartridge between a charged particle system and a position within the compartment, and a valve configured to seal the compartment at vacuum pressure during transport of the multiple samples between charged particle systems. In this way, samples such as lamellae may be transferred between charged particle systems while maintaining the samples at vacuum pressure, thereby reducing the possibility of sample contamination during sample transfer.
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