Invention Grant
- Patent Title: Lithographic apparatus, substrate table, and method
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Application No.: US17612679Application Date: 2020-05-05
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Publication No.: US11988971B2Publication Date: 2024-05-21
- Inventor: Matthew Lipson , Satish Achanta , Benjamin David Dawson , Matthew Anthony Sorna , Iliya Sigal , Tammo Uitterdijk
- Applicant: ASML HOLDING N.V. , ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML HOLDING N.V.,ASML NETHERLANDS B.V.
- Current Assignee: ASML HOLDING N.V.,ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven; NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman, LLP
- International Application: PCT/EP2020/062463 2020.05.05
- International Announcement: WO2020/239373A 2020.12.03
- Date entered country: 2021-11-19
- Main IPC: G03F7/00
- IPC: G03F7/00
Abstract:
A substrate table for supporting a substrate includes a surface and coarse burls. Each of the coarse burls includes a burl-top surface and fine burls. The coarse burls are disposed on the surface of the substrate table. The fine burls are disposed on the burl-top surface. The fine burls contact the substrate when the substrate table supports the substrate.
Public/Granted literature
- US20220082953A1 LITHOGRAPHIC APPARATUS, SUBSTRATE TABLE, AND METHOD Public/Granted day:2022-03-17
Information query
