- 专利标题: SONOS memory and method for making the same
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申请号: US17352451申请日: 2021-06-21
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公开(公告)号: US11980032B2公开(公告)日: 2024-05-07
- 发明人: Xiaoliang Tang , Naoki Tsuji , Haoyu Chen , Hua Shao
- 申请人: Shanghai Huali Microelectronics Corporation
- 申请人地址: CN Shanghai
- 专利权人: Shanghai Huali Microelectronics Corporation
- 当前专利权人: Shanghai Huali Microelectronics Corporation
- 当前专利权人地址: CN Shanghai
- 代理机构: Banner & Witcoff, Ltd.
- 优先权: CN 2010698851.3 2020.07.20
- 主分类号: H10B43/35
- IPC分类号: H10B43/35
摘要:
The present application discloses a method for manufacturing a SONOS memory, including: providing a substrate, wherein a first transistor gate of the SONOS memory and a first layer used for forming a second transistor gate are formed on the substrate; forming a patterned second layer on the upper surface of the first layer, wherein the second layer exposes the first layer corresponding to the outer side of the second transistor gate; performing first etching on the first layer exposed by the second layer; removing the second layer; and performing second etching on the first layer to form the second transistor gate. The present application also discloses a SONOS memory. The present application can form a vertical structure outside a selective transistor and a storage transistor, thus forming a vertical side wall in the subsequent process, so as to improve the performance of the device.
公开/授权文献
- US20220020755A1 SONOS Memory and Method for Making the Same 公开/授权日:2022-01-20
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