- 专利标题： Electrostatic chuck and method for manufacturing same
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申请号： US17044669申请日： 2019-04-24
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公开(公告)号： US11923227B2公开(公告)日： 2024-03-05
- 发明人: Yasunori Kawanabe , Yoshihiro Okawa
- 申请人： KYOCERA Corporation
- 申请人地址： JP Kyoto
- 专利权人： KYOCERA CORPORATION
- 当前专利权人： KYOCERA CORPORATION
- 当前专利权人地址： JP Kyoto
- 代理机构： Procopio, Cory, Hargreaves & Savitch LLP
- 优先权： JP 18086937 2018.04.27
- 国际申请： PCT/JP2019/017408 2019.04.24
- 国际公布： WO2019/208625A 2019.10.31
- 进入国家日期： 2020-10-01
- 主分类号： H01L21/683
- IPC分类号： H01L21/683 ; H01L21/67
摘要：
An electrostatic chuck includes an insulating base body including a predetermined surface, and an electrode inside the base body, which is layer shaped along the predetermined surface. An upper surface of the electrode facing a side where the predetermined surface is located and the base body are in contact. A gap which is rendered a vacuum or filled with a gas is interposed between a side surface of the electrode and the base body.
公开/授权文献
- US20210104426A1 ELECTROSTATIC CHUCK AND METHOD FOR MANUFACTURING SAME 公开/授权日：2021-04-08
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