- 专利标题： Collecting device and collecting method
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申请号： US17682934申请日： 2022-02-28
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公开(公告)号： US11923138B2公开(公告)日： 2024-03-05
- 发明人: Sho Kato , Yuji Yamada , Jiahong Wu
- 申请人： Kioxia Corporation
- 申请人地址： JP Tokyo
- 专利权人： KIOXIA CORPORATION
- 当前专利权人： KIOXIA CORPORATION
- 当前专利权人地址： JP Tokyo
- 代理机构： Foley & Lardner LLP
- 优先权： JP 21146835 2021.09.09
- 主分类号： H01F7/20
- IPC分类号： H01F7/20 ; G01N1/02 ; G01N1/04 ; G01N33/202 ; H01F1/44 ; H01J49/10 ; B01D11/02 ; G01N1/10 ; G01N1/40 ; G01N33/00 ; H01J49/00
摘要：
A collecting device includes a stage configured to place a substrate. A magnetic field generating unit holds, by a magnetic field, a first liquid containing a magnetic fluid and a collecting liquid to bring the first liquid into contact with at least an end portion of the substrate. A collecting unit collects the first liquid from the magnetic field generating unit. A separating unit separates the collecting liquid from the first liquid.
公开/授权文献
- US20230070820A1 COLLECTING DEVICE AND COLLECTING METHOD 公开/授权日：2023-03-09
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