- 专利标题: Amorphous metal oxide semiconductor layer and semiconductor device
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申请号: US17851868申请日: 2022-06-28
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公开(公告)号: US11894429B2公开(公告)日: 2024-02-06
- 发明人: Yoshiomi Hiroi , Shinichi Maeda
- 申请人: NISSAN CHEMICAL INDUSTRIES, LTD.
- 申请人地址: JP Tokyo
- 专利权人: NISSAN CHEMICAL INDUSTRIES, LTD.
- 当前专利权人: NISSAN CHEMICAL INDUSTRIES, LTD.
- 当前专利权人地址: JP Tokyo
- 代理机构: Oliff PLC
- 优先权: JP 10166778 2010.07.26
- 分案原申请号: US16928070 2020.07.14
- 主分类号: H01L29/24
- IPC分类号: H01L29/24 ; H01L21/02 ; H01L29/786 ; C04B35/626 ; C04B35/01 ; C04B35/453
摘要:
Methods for producing the amorphous metal oxide semiconductor layer where amorphous metal oxide semiconductor layer is formed by use of a precursor composition containing a metal salt, a primary amide, and a water-based solution. The methodology for producing the amorphous metal oxide semiconductor layer includes applying the precursor composition onto a substrate to form a precursor film, and firing the film at a temperature of 150° C. or higher and lower than 300° C.
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