- 专利标题： High power tungsten halogen lamp lifetime improvement through J-hook design
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申请号： US18196341申请日： 2023-05-11
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公开(公告)号： US11881392B2公开(公告)日： 2024-01-23
- 发明人: Yao-Hung Yang , Shantanu Rajiv Gadgil , Kaushik Rao , Vincent Joseph Kirchhoff , Sagir Kadiwala , Munirah Mahyudin , Daniel Chou
- 申请人： Applied Materials, Inc.
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Patterson + Sheridan, LLP
- 主分类号： H01K1/18
- IPC分类号： H01K1/18 ; H01K1/14 ; H01K1/20 ; H01K7/00
摘要：
A lamp and epitaxial processing apparatus are described herein. In one example, the lamp includes a bulb, a filament, and a plurality of filament supports disposed in spaced-apart relation to the filament, each of the filament supports having a hook support and a hook. The hook includes a connector configured to fasten the hook to the hook support, a first vertical portion extending from the connector toward the filament, and a rounded portion extending from an end of the first vertical portion distal from the connector and configured to wrap around the filament. A second vertical portion extends from an end of the rounded portion distal from the first vertical portion and the second vertical portion has a length between 60% and 100% of the length of the first vertical portion.
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