- 专利标题: Micromechanical structure and micromechanical sensor
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申请号: US17447876申请日: 2021-09-16
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公开(公告)号: US11860184B2公开(公告)日: 2024-01-02
- 发明人: Cristian Nagel , Johannes Classen , Lars Tebje , Rolf Scheben , Rudy Eid
- 申请人: Robert Bosch GmbH
- 申请人地址: DE Stuttgart
- 专利权人: ROBERT BOSCH GMBH
- 当前专利权人: ROBERT BOSCH GMBH
- 当前专利权人地址: DE Stuttgart
- 代理机构: NORTON ROSE FULBRIGHT US LLP
- 代理商 Gerard A. Messina
- 优先权: DE 2020211922.8 2020.09.23
- 主分类号: G01P15/08
- IPC分类号: G01P15/08 ; G01P15/125 ; B81B3/00
摘要:
A micromechanical structure including a substrate, a moveable seismic mass, a detection structure, and a main spring. The seismic mass is connected to the substrate using the main spring. A first direction and a second direction perpendicular thereto define a main extension plane of the substrate. The detection structure detects a deflection of the seismic mass and includes first electrodes mounted at the seismic mass and second electrodes mounted at the substrate. The first electrodes and second electrodes have a two-dimensional extension in the first and second directions. The micromechanical structure has a graduated stop structure including a first spring stop, a second spring stop, and a fixed stop.
公开/授权文献
- US20220091154A1 MICROMECHANICAL STRUCTURE AND MICROMECHANICAL SENSOR 公开/授权日:2022-03-24
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