- 专利标题: Piezoelectric microelectromechanical resonator device and corresponding manufacturing process
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申请号: US17031181申请日: 2020-09-24
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公开(公告)号: US11855604B2公开(公告)日: 2023-12-26
- 发明人: Federico Vercesi , Lorenzo Corso , Giorgio Allegato , Gabriele Gattere
- 申请人: STMICROELECTRONICS S.r.l.
- 申请人地址: IT Agrate Brianza
- 专利权人: STMICROELECTRONICS S.r.l.
- 当前专利权人: STMICROELECTRONICS S.r.l.
- 当前专利权人地址: IT Agrate Brianza
- 代理机构: Seed IP Law Group LLP
- 优先权: IT 2019000017552 2019.09.30
- 主分类号: H03H9/10
- IPC分类号: H03H9/10 ; B81B7/00 ; B81C1/00 ; H03H3/02 ; H03H9/17 ; H03H9/15
摘要:
A microelectromechanical resonator device has: a main body, with a first surface and a second surface, opposite to one another along a vertical axis, and made of a first layer and a second layer, arranged on the first layer; a cap, having a respective first surface and a respective second surface, opposite to one another along the vertical axis, and coupled to the main body by bonding elements; and a piezoelectric resonator structure formed by: a mobile element, constituted by a resonator portion of the first layer, suspended in cantilever fashion with respect to an internal cavity provided in the second layer and moreover, on the opposite side, with respect to a housing cavity provided in the cap; a region of piezoelectric material, arranged on the mobile element on the first surface of the main body; and a top electrode, arranged on the region of piezoelectric material, the mobile element constituting a bottom electrode of the piezoelectric resonator structure.
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