- 专利标题: Semiconductor package with air gap
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申请号: US17524928申请日: 2021-11-12
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公开(公告)号: US11830837B2公开(公告)日: 2023-11-28
- 发明人: Tse-Yao Huang
- 申请人: NANYA TECHNOLOGY CORPORATION
- 申请人地址: TW New Taipei
- 专利权人: NANYA TECHNOLOGY CORPORATION
- 当前专利权人: NANYA TECHNOLOGY CORPORATION
- 当前专利权人地址: TW New Taipei
- 代理商 Xuan Zhang
- 分案原申请号: US16864767 2020.05.01
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; H01L23/31 ; H01L25/065
摘要:
The present application provides a semiconductor package with air gaps for reducing capacitive coupling between conductive features and a method for manufacturing the semiconductor package. The semiconductor package includes a first semiconductor structure and a second semiconductor structure bonded with the first semiconductor structure. The first semiconductor structure has a first bonding surface. The second semiconductor structure has a second bonding surface partially in contact with the first bonding surface. A portion of the first bonding surface is separated from a portion of the second bonding surface, a space between the portions of the first and second bonding surfaces is sealed and forms an air gap in the semiconductor package.
公开/授权文献
- US20220077091A1 SEMICONDUCTOR PACKAGE WITH AIR GAP 公开/授权日:2022-03-10
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